toroidal chamber
- toroidal chamber的基本解释
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环形室
- 更多网络例句与toroidal chamber相关的网络例句 [注:此内容来源于网络,仅供参考]
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The fixed flush 3-probe arrays, mounted on the 4 divertor neutralization plates at the same toroidal cross-section in divertor chamber, are used to measure the profiles of the electron temperature, density and float potential.
用偏滤器靶板上的14组嵌入式静电3探针阵列测量了同一环向截面的内外中性化板上的电子温度、密度、悬浮电位及其分布。
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A plasma generation apparatus includes: a chamber having a chamber lid and defining an airtight reaction region; a susceptor in the chamber; a gas supply means supplying a process gas to the chamber; and a toroidal core vertically disposed with respect to the susceptor through the chamber lid, comprising: a toroidal ferromagnetic core combined with the chamber, the toroidal ferromagnetic core having a first portion outside the chamber and a second portion inside the chamber, the second portion having an opening portion; a radio frequency power supply connected to the chamber; an induction coil electrically connected to the RF power supply, the induction coil rolling the first portion; and a matching circuit matching an impedance between the RF power supply and the induction coil.
一种等离子体产生装置包括:一腔室,其具有一腔室盖并界定一气密反应区域;一在所述腔室中的基座;一气体供应构件,其将一制程气体供应到所述腔室;和一环形铁芯,其穿过所述腔室盖相对于所述基座垂直设置,所述环形铁芯包含:一与所述腔室相组合的环形铁磁芯,所述环形铁磁芯具有一在所述腔室外的第一部分和一在所述腔室内的第二部分,所述第二部分具有一开口部分;一连接到所述腔室的射频电源;一电连接到所述RF电源的感应线圈,所述感应线圈卷绕所述第一部分;和一匹配电路,其匹配所述RF电源与所述感应线圈之间的一阻抗。
- 更多网络解释与toroidal chamber相关的网络解释 [注:此内容来源于网络,仅供参考]
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toroidal coil:环式线圈
环形室 toroidal chamber | 环式线圈 toroidal coil | 环状形态 toroidal configuration
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toroidal coil:环形磁路,环形线圈
toroidal chamber 环形室 | toroidal coil 环形磁路,环形线圈=>トロイダルコイル | toroidal combustion chamber 环形燃烧室
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toroidal coil:环形磁路,环形线圈
toroidal chamber 环形室 | toroidal coil 环形磁路,环形线圈=>トロイダルコイル | toroidal combustion chamber 环形燃烧室