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Moreover, the micro-pattern etching of electrodes and PZT thin films have been investigated, and the fast and successful etchings have been actualized with new etchants and original methods. The technics and mechanism of anisotropic etching of monocrystalline silicon have been studied deeply, for example the influences of the concentration and temperature of tetramethyl ammonium hydroxide on the rate and effect of the anisotropic etching.
此外，结合PZT铁电薄膜热释电单元红外探测器的设计和制备，对电极和PZT铁电薄膜的微图形刻蚀工艺进行了研究，采用新的刻蚀液配方和具有独创性的方法，实现了对PZT铁电薄膜和上下电极快速、成功的刻蚀。
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Proper etchants were chosen to etch different planes of KDP crystal.
利用化学腐蚀法对KDP晶体的不同晶面进行了腐蚀，得到了清晰的位错蚀坑。
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The chemical properties of these surface differ considerably, particularly in their reaction to etchants.
这些不同的晶面，具有很不相同的化学性质，特别是对化学腐蚀剂的反应不一致。
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The black and white pits developed by EAg etchants on (111) B surface are observed.
实验中也首次观察到了EAg腐蚀剂的黑白平底坑。
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Table 2 summarises the preferred etchants for preferred metals and alloys.
表2总结为首选的金属和合金的首选腐蚀剂。
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etchants：蚀刻液
etch rate 蚀铜速率 | etchants 蚀刻液 | etchback 回蚀
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etchants：蚀刻剂
Etch:刻蚀 | Etchants蚀刻剂 | Etched features 蚀刻特点
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etchants：腐(浸)蚀剂,蚀刻剂
esters 酯类 | etchants 腐(浸)蚀剂,蚀刻剂 | etching 蚀刻,浸蚀
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etchants：浸蚀剂
estuarine 河口;河口湾 | etchants 浸蚀剂 | etching agent stirrer 腐蚀剂搅拌机
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PAE Aluminum Etchants：鋁蝕刻劑
?Nitric Acid 硝酸 | ?PAE Aluminum Etchants 鋁蝕刻劑 | ?Phosphoric Acid 磷酸
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