degenerately
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The basic reason for oxygen concentration reduction in heavily Sb-doped CZSi was that oxygen solubility decreased when element Sb with larger radius doped degenerately into silicon crystal.
为解释重掺锑硅单晶中氧含量较普通直拉硅低,且随着掺锑量增加,氧含量下降,而重掺硼硅单晶中氧含量并不降低这一实验事实,应用热力学计算,得到重掺锑硅单晶生长时,生成Sb〓O〓的反应不能自发进行,因此不会因Sb〓O〓的大量挥发而使重掺锑硅单晶中氧含量降低。
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In the experimental processes, the degenerately p-doped silicon wafers with 100 nm silicon oxide were used as the back gate; palladium metal electrodes were formed by photolithography combined with lift-off technique, and finally deposited and aligned CNTs on the predefined electrode pairs to complete devices fabrication by using alternating current dielectrophoresis.
在实验制作方面,我们以退化型之重掺杂矽基材作为背闸极,基材上方长出100nm之氧化矽绝缘层,配合微影制程定义钯电极於介电层上,再利用介电泳力将奈米碳管接合至电极上方,完成奈米碳管电子元件之制作。