bolometers
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We can calibrate various radiation thermometers and radiation heat flux bolometers, for example, IR-thermometers, IR-tympanic thermometers.
能够进行各种辐射温度计的校正工作，例如辐射高温计，红外温度计和红外耳温计，以及校正一些辐射热流计。
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Pyrometers, radiometers, bolometers are used for determining heat radiation and have applications for measuring the surface temperature of hot lavas.
高温计、辐射计、辐射热测量仪用来测定热辐射和热岩熔的表面温度。
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In this dissertation,preparation and thermoelectric characterization of conventional silicon-based materials and devices have been studied, including amorphous silicon films, polycrystalline silicon germanium films and amorphous silicon thin-film-transistors. A novel MEMS-IC integration method based on porous silicon micromachining has been developed, which is used to fabricate resistive bolometers with a-Si and polySiGe films, and a-Si TFT-based room-temperature infrared detector pixels and 8×8 arrays with primary capability of thermal imaging have been reported for the first time.
本文深入系统地研究了a-Si薄膜、polySiGe薄膜和a-Si TFT等三种常规硅基材料和器件的制备方法和热电特性，开发了一套新型的基于多孔硅牺牲层技术的MEMS-IC集成工艺，利用该工艺成功地制作了a-Si和polySiGe薄膜电阻式测辐射热计，在国际上首次提出并实现了基于a-Si TFT的室温红外探测器单元与8×8阵列原型，器件初步具备了室温红外热成像的能力。
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High Tc GdBa2Cu3O7-δ Superconducting Thin Film Bolometers.
高Tc GdBa2Cu3O7-δ薄膜阵列式红外探测器研究。
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Finally, based on theoretical analysis and structure designs of a-Si and polySiGe bolometers and TFT-based room-temperature infrared detectors, layouts and process-flow designs are performed. The a-Si and polySiGe bolometers with various structures and dimensions are fabricated using the MEMS-IC integration processes proposed in this dissertation. For the first time, the a-Si TFT-based room-temperature infrared detectors and arrays are demonstrated. Several fabrication runs are conducted to increase the yield.
在理论分析和结构设计的基础上，对a-Si、polySiGe测辐射热计和a-Si TFT室温红外探测器进行了版图和工艺设计，采用基于多孔硅牺牲层技术的MEMS-IC集成工艺制作了多种结构尺寸的a-Si和PolySiGe测辐射热计，并且首次实现了a-Si TFT室温红外探测器及阵列，进行了多次工艺流水，器件成品率较高。
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Bolometers：辐射热测定器
bolometer 测辐射热器 | Bolometers 辐射热测定器 | bolometric detector 辐射热测器