ALN
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The results shows that the flow characteristics of SiC-AlN granulated powder is obviously promoted after spray drying and a suitable particles grade match. With the increasing of pressure, the density of green body increases by the style of ladder at the pressure range of 4080 MPa, 80160 MPa and 160220 MPa, the green body is uniform and densification without hard pelleted particles above 160 MPa. The pressureless sintering SiC-AlN multiphase ceramic possesses superior sintering properties and mechanical properties. It is due to the rampart formation of AlN to SiC grain growth and the reaction of SiC and AlN to form 2H solid solution. It results in the grain fining, crack expansion producing bypass and deflection, fracture section producing tearing-open and pulling-out effects, which cooperatively improves the strength and fracture toughness of the multiphase ceramics.
结果表明:喷雾造粒后,复合粉体的流动特性显著提高,粒度级配合理;随着压强增加,坯体密度在40~80、80~160和160~220 MPa范围内呈现阶梯式增长,160 MPa以上成形后素坯均匀致密,无硬球颗粒存在;无压烧结SiC-AlN复相陶瓷具有优越的烧结性能和力学性能,这是由于AlN对SiC晶粒形成生长势垒,并反应生成2H型固溶体,从而细化晶粒,导致裂纹扩展产生了绕道与偏转效应,呈现晶粒撕裂与拨出现象,协同改善了复相陶瓷的强度及断裂韧性。
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AlN MSM devices were fabricated on AlN epitaxial thin film deposited on GaN/Sapphire substrates using helicon sputtering system at the low temperature of 300°C. The device characteristic was found to be improved by in situ metallization of Al electrodes. The extremely low dark current (1.39pA at 20V), the ideal factor (1.0125) and the Schottky barrier height (0.916eV) are superior compared to those of AlN MSM in the literature. When the device was illuminated by the 150W D2 lamp, the ratio of the induced photocurrent to dark current is more than 2 orders of magnitude. The illumination effect also shows the linear relationship between the radiation power and the photo current for the MSM devices, indicating the potential applicability for deep UV sensors.
氮化铝金属-半导体-金属光侦测器则是用In situ metallization制程,利用低温回旋溅镀法在氮化镓/蓝宝石基板上沉积之氮化铝,再直接溅镀金属铝作为指叉电极,比较目前文献制作出来的氮化铝MSM元件,可得到很好的元件金半接面之理想因子1.0125,算出萧特基能障高度为0.916eV,并有很低的暗电流为1.39 pA,提升了元件的特性,使用150 W氘灯入射,光暗电流差距可到两个order,且元件之光电流与入射光功率呈线性,显示所制作之氮化铝MSM元件,很适合针对深紫外光波段侦测。
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The columniform samples are made with the pressure of 150?MPa that contain graphite,Al 2O 3,SiO 2 and MgO powder.With samples heated at 1?420?℃,1?500?℃ and 1?600?℃ for 4 hours,MgAlON and 21R-AlN Sialon are synthesized by carbothermal reduction nitridation in the sample,MgAlON and 21R-AlN Sialon occure at 1?420?℃.With tempreture rising to 1?600?℃,MgAlON and 21R-AlN Sialon are increasing.
与高温氧化物相比,碳由于熔点高,热膨胀系数小,导热性好,热稳定性和化学稳定性好,不易被液态金属和熔渣润湿等特点,而成为优质耐火原料,使耐火材料在抗熔渣侵蚀和抗热震等性能方面得到质的飞跃。
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